In a variety of applications, including signal processing, clock referencing, sensing, and
others, microelectromechanical systems (MEMS) have been shown to be effective and
broadly used. This study explores the dynamical response of a nonlinear MEMS resonator
when subjected to a sudden mechanical shock under electrical excitation in the presence
of quintic nonlinearity. The method of multiple scales (MMS) is utilized to construct
the analytical formulas for analyzing the amplitude and phase response during primary
resonance conditions. The analytical results are verified and compared with numerical simulations performed using the fourth-order Runge–Kutta method. Additionally, a parametric
analysis is performed to examine the effect of different shock values on the resonator’s
response and stability utilizing the Jacobian matrix. The agreement between analytical
and numerical approaches proves MMS’s effectiveness in analyzing the shock impact on
the MEMS resonator. The results provide valuable knowledge about the response and
stability of MEMS resonators under mechanical shock, which is crucial for robust design in
challenging conditions. |
