The two-dimensional Laplace integral transform technique has been applied to get the spatial and temporal temperature distributions
in both the molten layer thickness of a thin film coated on a substrate, the still solid part of the thin film of the target and the temperature
distribution in the substrate. Also a formula for the time dependence of the evaporated part of the thin film of the target as well as the molten layer thickness of the thin film were obtained. Calculations of the obtained relations were carried out during the irradiation with a pulsed laser. The derivation has taken into account the temperature-dependent absorption coefficient of the irradiated surface and the chemical reaction in the vapor of the thin film. As an illustrative example, computations were carried out on an aluminum thin film coated on a glass substrate |
