Recently, nanopositioning became one of the most
indispensable technologies used in fabrication and
characterization processes of micro-electromechanical systems
(MEMS). Most of these processes require a positioning system
that can achieve tens of millimeters stroke with a nanometerrange
precision at the same time, which is impossible to achieve
with conventional positioning stages. In this paper, a long stroke
hybrid nanopositioning stage is presented. The proposed hybrid
system consists of a new magnifying modular pantograph
compliant piezo-actuated mechanism mounted above a longstroke
ball screw driven stage. This mechanism can compensate
for the positioning errors of the underlying ball screw driven
stage and achieve such requirements of nanometer-range
precision at the same time. The dynamic model of the whole
system is proposed in detail and its control system structure.
Finally, the results are presented to verify the positioning
accuracy of the hybrid system. |
